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Sinovac Technology Limited

Products >> PVD system(Small scale )

PVD system(Small scale )

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Description
Product Name: PVD system(Small scale )
Supply Ability: 1
Related proudcts
Specifications Small scale
Price Term: Neg (FOB)
Port of loading: Zhongshan port
Minimum Order 1
Unit Price: L/C TT

Small-scale PVD system

The coating system was specially designed for middle size products functional coating purposes with high productivity. The vacuum chamber unit has a cylinder design with one door opened on the front of the process chamber and 6 (six) cathode Arc Ion Sources.

The system is supplied with all necessary manifolds, valves, traps, controls, vacuum gauges and piping to achieve operating vacuum pressure.

The pumping system is controlled through the PLC supplied with the equipment. All necessary information to the vacuum system is displayed on a colored PLC touch screen.

Inner size of the chamber---Diameter: 600&©|65374;800mm; Height: 600mm&©|65374;1000mm
Vacuum pumping system---Oil diffusion pump + Root's pump + Rotary pump
Controlling system---PLC & Touch Screen or PLC & PC
Ionization source & Bias power supply --Number of targets: 4&©|65374;8; Power of BIAS: 10kW&©|65374;20kW

Contact Us
Company: Sinovac Technology Limited
Contact: Mr. Aiven Yang
Address: ZHONGSHAN TORCH HI-TECH INDUSTRIAL DEVELOPMENT ZONE,
Postcode: 528437
Tel: 86-760-8282173
Fax: 86-760-5598024
E-mail:         


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Tel : 86-760-8282173 Fax : 86-760-5598024
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