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Product Name: |
PVD system(Small scale )
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Supply Ability: |
1 |
Related proudcts |
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Specifications |
Small scale |
Price Term: |
Neg (FOB) |
Port of loading: |
Zhongshan port |
Minimum Order |
1 |
Unit Price: |
L/C TT |
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Small-scale PVD system
The coating system was specially designed for middle size products functional coating purposes with high productivity. The vacuum chamber unit has a cylinder design with one door opened on the front of the process chamber and 6 (six) cathode Arc Ion Sources.
The system is supplied with all necessary manifolds, valves, traps, controls, vacuum gauges and piping to achieve operating vacuum pressure.
The pumping system is controlled through the PLC supplied with the equipment. All necessary information to the vacuum system is displayed on a colored PLC touch screen.
Inner size of the chamber---Diameter: 600&©|65374;800mm; Height: 600mm&©|65374;1000mm Vacuum pumping system---Oil diffusion pump + Root's pump + Rotary pump Controlling system---PLC & Touch Screen or PLC & PC Ionization source & Bias power supply --Number of targets: 4&©|65374;8; Power of BIAS: 10kW&©|65374;20kW |
Company: |
Sinovac Technology Limited
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Contact: |
Mr. Aiven Yang |
Address: |
ZHONGSHAN TORCH HI-TECH INDUSTRIAL DEVELOPMENT ZONE, |
Postcode: |
528437 |
Tel: |
86-760-8282173 |
Fax: |
86-760-5598024 |
E-mail: |
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